News ASML and TSMC Reveal More Details About 3nm Process Technology

Those tools are expensive in both money and time. They're incredibly complex and MASSIVE. You have to reinforce your fab flooring to hold the weight of one. You also have to install a cleanroom-approved gantry crane system in the ceiling for moving the chunks of the tool around during maintenance. It's crazy to see.
 
Intel also has several of these new EUV lithography scanners from ASML but can't even do 7nm. I think it says a lot about the quality of their engineering team.