News Atomic-scale chip alignment: Laser holograms could set new standard for 3D semiconductor overlay accuracy

[Admin]

UMass Amherst researchers have developed a laser-based holographic alignment method that could revolutionize overlay accuracy in semiconductor manufacturing, though its industrial adoption may hinge on integration with existing lithography systems.

Atomic-scale chip alignment: Laser holograms could set new standard for 3D semiconductor overlay accuracy : Read more

 

[JRStern]

Super-interesting. I wonder if beyond positioning it can also focus DUV/EUV patterns more sharply?
Between both that could boost yield dramatically.
But it's probably all new tech, will require all new production equipment.

 

[bit_user]

Neat, but uh... how do you nudge a chip just 0.3 nm to the left?

 

[bolweval]

Neat, but uh... how do you nudge a chip just 0.3 nm to the left?

Just pound your fist on the left side of your desk!

 

[jkflipflop98]

Neat, but uh... how do you nudge a chip just 0.3 nm to the left?

There's a company in Israel that makes ultra-precision steppers called Galil. They're able to achieve some crazy awesome accuracy.