In a EUV up at the IEDM 2019 conference, ASML has disclosed that the number of wafers run through an EUV tool reached 4.5 million at the beginning of 2019. The latest NXE:3400C achieved 170WPH.
AMSL: 4.5 Million Cumulative EUV Wafers Processed Through 2018 : Read more
AMSL: 4.5 Million Cumulative EUV Wafers Processed Through 2018 : Read more