News China-based firm delivers its first chipmaking tool that stamps nanoscale chip designs onto wafers — Prinano's nanoimprint lithography tool uses qu...

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The article said:
only if the quartz mold can be manufactured with matching accuracy and defects can be kept low.
This is a key point, isn't it?

Also, talking about line widths, I think I read that Intel's old Fin FET node (maybe even 22 nm?) had just an 8 nm fin pitch. The way they accomplished this was by a chemical process to erode that fin layer. So, I get kind of lost when different pitches and feature sizes are being compared, TBH.
 
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