thestryker
Splendid
The costs of multi-patterning are immense and while we'll probably never know the exact cost it's telling that this is a driving factor behind TSMC rushing N3E and Intel not licensing Intel 7 to anyone.As the article said, multi-patterning takes longer and hurts yield, both of which serve to limit fab throughput on these advanced nodes.
The costs involved for SMIC could definitely be hidden due to the way many Chinese companies do business and the national importance for the company. I doubt it's something they could feasibly deal with long term so I wouldn't be surprised to see a plateau of node improvement as lithography machines are developed.