Canon's nanoimprint lithography tools will ship either this year or next, they will address 3D NAND manufacturing first.
New 'stamping' chipmaking technique uses 90% less power than EUV — Canon to ship the first nanoimprint litho tools to customers this year or next : Read more
New 'stamping' chipmaking technique uses 90% less power than EUV — Canon to ship the first nanoimprint litho tools to customers this year or next : Read more