News New 'stamping' chipmaking technique uses 90% less power than EUV — Canon to ship the first nanoimprint litho tools to customers this year or next

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Feb 7, 2024
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When a litho machine costs over 100 million, the power bill becomes small.

Anyway, I understood implanters (tools to dope the silicon) use far more power anyway.
 

bit_user

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When a litho machine costs over 100 million, the power bill becomes small.
I dunno... what I've heard about the light source they use for EUV is pretty mind-blowing. Might want to look it up, as I'm too fuzzy on the details to attempt stating them from memory and don't remember exactly where I read it.

Maybe power is still not the dominant cost, but in terms of operating costs I think it's probably non-trivial.
 
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