News Chinese scientists create solid-state DUV laser sources for lithography equipment used in chip manufacturing

[Admin]

The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from commercialization.

Chinese scientists create solid-state DUV laser sources for lithography equipment used in chip manufacturing : Read more

 

[bit_user]

However, perspectives on scaling solid-state lasers are unknown.

I think you mean to say "prospects for", since you're qualifying them as "unknown".

BTW, is the 6 kHz vs. 9 kHz discrepancy of any significance? Is it not the total output in Joules that really matters? Unless the pulse widths are similar in duration, I don't see their rapidity as relevant comparison. However, I can see that, when trying to optimize a laser's output, increasing the pulse rate seems like one avenue that's natural to pursue.

I guess another key question would be whether the optical techniques they're using to process the beam should scale to the kinds of power outputs needed.

 

[The Historical Fidelity]

I think you mean to say "prospects for", since you're qualifying them as "unknown".

BTW, is the 6 kHz vs. 9 kHz discrepancy of any significance? Is it not the total output in Joules that really matters? Unless the pulse widths are similar in duration, I don't see their rapidity as relevant comparison. However, I can see that, when trying to optimize a laser's output, increasing the pulse rate seems like one avenue that's natural to pursue.

I guess another key question would be whether the optical techniques they're using to process the beam should scale to the kinds of power outputs needed.

This appears to be a copy of research already conducted by the University of Tokyo published in 2018.

https://www.mdpi.com/2076-3417/8/2/233

And a simple google search yielded this IEEE paper on the invention of a solid state single frequency 193-nm laser from 1998.

C. E. Hamilton, C. B. Doughty, P. M. Roper, R. D. Mead and S. C. Tidwell, "All solid-state, single-frequency 193-nm laser system for deep-UV metrology," Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243), Orlando, FL, USA, 1998, pp. 322-323 vol.1, doi: 10.1109/LEOS.1998.737860. keywords: {Solid state circuits;Solid lasers;Metrology;Laser beams;Optical harmonic generation;Frequency;Diode lasers;Laser stability;Nonlinear optics;Optical pumping},

 

[RaScry]

This seems like a bit of a nothing-burger.

.070 Watts from an extremely complicated multiple beam, non-linear interference process?

‘Solid-state laser’ had me thinking this was starting development of DUV diode laser.

 

[TCA_ChinChin]

This appears to be a copy of research already conducted by the University of Tokyo published in 2018.

https://www.mdpi.com/2076-3417/8/2/233

That paper looks to be a summary/review of then current research of the subject matter. The paper by the Chinese team presents the research + testing done:
https://www.spiedigitallibrary.org/...ed-laser-source/10.1117/1.APN.4.2.026011.full

And a simple google search yielded this IEEE paper on the invention of a solid state single frequency 193-nm laser from 1998.

C. E. Hamilton, C. B. Doughty, P. M. Roper, R. D. Mead and S. C. Tidwell, "All solid-state, single-frequency 193-nm laser system for deep-UV metrology," Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243), Orlando, FL, USA, 1998, pp. 322-323 vol.1, doi: 10.1109/LEOS.1998.737860. keywords: {Solid state circuits;Solid lasers;Metrology;Laser beams;Optical harmonic generation;Frequency;Diode lasers;Laser stability;Nonlinear optics;Optical pumping},

The diagrams from the 1998 paper seems to have different stages compared to this new method. Their main claim is "This is, to our knowledge, the first demonstration of a 193-nm vortex beam generated from a solid-state laser. Such a beam could be valuable for seeding hybrid ArF excimer lasers and has potential applications in wafer processing and defect inspection."

Titles for news articles might have exaggerated this, but the paper itself is very specific in what 'breakthrough' they actually accomplished.

Really don't think this is a copy of either the 2018 summary paper or the 1998 research experiment. They probably share similarities since they are research papers in a highly specific scientific field.

 

[The Historical Fidelity]

That paper looks to be a summary/review of then current research of the subject matter. The paper by the Chinese team presents the research + testing done:
https://www.spiedigitallibrary.org/...ed-laser-source/10.1117/1.APN.4.2.026011.full

The diagrams from the 1998 paper seems to have different stages compared to this new method. Their main claim is "This is, to our knowledge, the first demonstration of a 193-nm vortex beam generated from a solid-state laser. Such a beam could be valuable for seeding hybrid ArF excimer lasers and has potential applications in wafer processing and defect inspection."

Titles for news articles might have exaggerated this, but the paper itself is very specific in what 'breakthrough' they actually accomplished.

Really don't think this is a copy of either the 2018 summary paper or the 1998 research experiment. They probably share similarities since they are research papers in a highly specific scientific field.

Yes I agree, I was refuting the news article’s unsubstantiated claims, not really the research article itself.